作　　者： ; ; ; ; ;

机构地区： 重庆大学光电工程学院光电技术及系统教育部重点实验室

出　　处： 《光学学报》 2007年第12期2240-2244,共5页

摘　　要： 提出了一种用于显示的,基于透射型法布里-珀罗干涉的微机电系统(MEMS)光学调制器。基于多光束干涉原理分析了调制器的光学特性,推导出了调制器结构的特征参量。分析表明,当调制器的腔长为cλ/4时,透射光可以实现暗态显示;当调制器的腔长取为零或cλ/2时,透射光可以实现亮态显示。通过控制法布里-珀罗腔长,就可实现调制器的明暗调制。理论上证明了该调制器用于显示的可行性。设计了一种基于微机电系统的透射型法布里-珀罗光学调制器结构,该调制器的理论衬比度达到150。仿真结果表明,该调制器具有2.4 V的低电压静电驱动性能。 A transmitting Fabry-Pérot light modulator for display application is proposed. Its optical characteristics are analyzed with multiple beam interference theory. The typical parameters of the light modulator for display are deduced. When the Fabry-Pérot cavity length is λc/4, almost all transmitted light is cut off, the modulator is ＂off＂ state. While when the cavity length is 0 or λc/2, corresponding light can transmit the modulator, the modulator is ＂on＂ state. It is theoretically proved that this light modulator is capable for display. Finally, one light modulator structure based on micro-electro mechanical system （MEMS） is given. Contrast ratio of this device is 150 by theoretical calculation. Result of the software simulation shows that this structure has as low as 2.4 V actuating voltage.

关 键 词： 微机电系统 法布里 珀罗光调制器 干涉 显示

领　　域： [电子电信]