作　　者： ; ; ; ;

机构地区： 华南理工大学材料科学与工程学院

出　　处： 《华南理工大学学报（自然科学版）》 2007年第8期89-92,共4页

摘　　要： 以可溶性无机盐为原料,乙二氨四乙酸、柠檬酸、酒石酸为复合螯合剂,水为溶剂,采用溶胶-凝胶法在Al2O3基片上制备了钙钛矿结构的BaPbO3导电薄膜.利用X射线衍射和能量散射X射线能谱表征方法,并结合薄膜方块电阻的测定,探讨了热处理方式和热处理温度对薄膜化学组成及薄膜电阻的影响.研究表明,与常规热处理技术相比,采用快速热处理工艺制备BaPbO3薄膜需要更高的热处理温度,同时,随着热处理温度的升高,薄膜中的Pb/Ba摩尔比下降,导致薄膜方块电阻上升.采用常规热处理方法,在670℃下保温10min可以制备膜厚约2.5μm、薄膜方块电阻为32Ω/□的BaPbO3薄膜. Conductive perovskite-type BaPbO3 thin films were deposited onto Al2O3 substrates by a modified sol-gel method, using ethylene diamine tetra-acetic acid, citric acid and tartaric acid as the complex chelating agent and with water as the solvent. Then, the effects of heat treatment and temperature on the chemical composition and sheet resistance of the prepared films were investigated by XRD, EDXS and sheet resistance measurements. The re- sults show that, in contrast with the conventional thermal annealing, the rapid thermal annealing technique requires higher annealing temperature to synthesize the BaPbO3 phase and, at the same time, the molar ratio of Pb to Ba decreases with the increase of annealing temperature, which results in the increase of sheet resistance of BaPbO3 thin films. Moreover, by the conventional thermal annealing technique, BaPbO3 films with a sheet resistance of 32Ω/□ and a thickness of 2.5 μm can be obtained by means of annealing at 670℃ for 10 min.

关 键 词： 铅酸钡 薄膜 溶胶 凝胶法 热处理 化学组成 方块电阻

领　　域： [电子电信]