作　　者： ; ; ; ; ;

机构地区： 东北大学机械工程与自动化学院

出　　处： 《功能材料》 2007年第6期872-875,共4页

摘　　要： 应用中频反应磁控溅射技术在载玻片上制备掺铈的Al2O3薄膜,在固定的电源功率下,氩气流量为43ml/min,氧流量为10ml/min,室温下溅射时间为90min的条件下,通过控制薄膜中的Ce3+离子的掺杂量来改变薄膜的发光性能。通过X光能量散射谱(EDS)和光致发光测量,得到发光强度和发光峰位对薄膜中的Ce3+浓度有强烈的依赖关系,并且分析了产生这种关系的原因;对发光激发谱分析表明,薄膜发光是源于薄膜中形成的氯化铈集合体中的Ce3+。Al2O3∶Ce3+发光膜可应用于需要蓝光发射的平板显示领域。 Aluminum oxide film doped with cerium have been deposited by the MF reactive magnetron sputtering technique. With the deposition condition of constant power, 30min duration, Ar and O2 flow of 43 and 10ml/ min, the relationship of luminescent properties of Al2O3：Ce^3＋ films with the amount of Ce^3＋ incorporated in the films was studied. The presence of Ce^3＋ as well as the stoichiometry of these films have been determined by energy dispersive X-ray spectroscope （EDS） measurements. It is observed that the total luminescence intensity increases and the peak sits are strongly dependent on cerium concentration in the films. And the reason for the dependence is analyzed. It is proposed that the light emission observed generated by luminescent center associated with cerium chloride molecular rather than to atomic cerium impurities. The crystalline structure of the sample was analysed by X-ray diffractometry （XRD）. This luminescence feature has an advantage for display techniques, which require a purer blue emission.

关 键 词： 三氧化二铝薄膜 磁控溅射 掺杂浓度 光致 发光

领　　域： [一般工业技术]