作　　者： ; ; ; ; ; ;

机构地区： 深圳大学光电子学研究所

出　　处： 《中国材料科技与设备》 2007年第3期29-31,共3页

摘　　要： 以氮化铝粉料为原料，在高纯氮气条件下用物理气相法制备氮化铝晶体。采用不同方法对氮化铝粉料进行预处理，研究它对氮化铝晶体形态的影响。实验结果表明，通过对氮化铝粉料的预烧结，可以有效地减少粉料中杂质的含量，实现合适的气体输运速率，从而得到了尺寸较大、质量较高的六棱柱形的氮化铝单晶体。 AlN crystals were grown from AlN powder source by physical vapor technique under pure nitrogen atmosphere condition. The effects of different pretreatment methods of AlN powders on the morphology of A1N crystals were studied. It was found that the sintering procedure could reduce the impurity concentration in the A1N source effectively and given proper vapor transformation rate. By using the sintering procedure, high quality and large size A1N single crystals with hexagonal structure were obtained in our experiments.

关 键 词： 氮化铝 晶体 物理气相法 晶体形态

领　　域： [冶金工程] [冶金工程]