作　　者： ; ; ;

机构地区： 中北大学电子与计算机科学技术学院电子测试技术国家重点实验室

出　　处： 《传感技术学报》 2006年第6期2529-2531,共3页

摘　　要： 针对电容式MEMS器件,设计了一种用来检测微小差分电容的电路,该电路主要有方波信号发生器、相敏解调和低通滤波电路等组成.具有抗干扰性能好、电路简单、易于集成的特点.通过主要器件———运放的合理选择,调试出较理想的结果.经实验验证,其分辨率可达10-16F. A circuit to detect the micro-differential capacitance was designed, which can be successfully applied in the capacitive MEMS devices. The circuit mainly was composed of a generator circuit of rectangle wave, phase sensitive demodulation and low pass filter circuit. This circuit was simply and easy to integrate, it has a good anti-disturbed ability, the main component is amplifier, through the choice of the amplifier ,can get the ideality wave. Experiment results shown it precision can reach 10^-16F.

关 键 词： 差分电容 充放电 相敏解调

领　　域： [自动化与计算机技术] [自动化与计算机技术]