作 者: ;
机构地区: 韩山师范学院物理与电子工程系
出 处: 《韩山师范学院学报》 2006年第6期38-42,共5页
摘 要: 非晶硅晶化的检测仪器有很多,主要有扫描电子显微镜、X射线衍射仪和喇曼谱仪.采用上述检测仪器检测铝诱导非晶硅样品的场致晶化,讨论了各种检测手段对分析铝诱导非晶硅场致晶化情况的影响和意义。 There are many test apparatus such as scanning electron microscopy(SEM), x-ray diffraction (XRD)and Raman spectroscopy for crystallization of amorphous silicon (a-Si). The differences among the three test methods for aluminum-induced crystallization of a-Si in an electric field are elucidated in this article.
领 域: [电子电信]