作　　者： ; ; ; ;

机构地区： 重庆大学光电工程学院光电技术及系统教育部重点实验室

出　　处： 《传感技术学报》 2006年第05A期1764-1767,共4页

摘　　要： 基于MEMS的光栅平动式光调制器(GratingMovingLightModulator,简称GMLM)是通过改变结构中可动光栅上表面和下反射面之间的微间距来实现光能量的调制.对GMLM工艺进行了简单的介绍,采用波长扫描方法对GMLM测试样品的可动光栅上表面和下反射面之间的微间距进行了测试.重点分析了微间距的测试方法,并提出了双峰法和多峰法的数据处理方法.结果表明:采用多峰法使微间距测试精度提高了k倍,波长扫描方法测试结果和理论结果吻合.与VEECO公司测量结果(h=1.24μm)对比,利用波长扫描方法的相对测试误差小于1%;该测试方法精度达到纳米量级. Grating moving light modulator （GMLM） is a novel MEMS-based movable diffraction grating, which light modulation is completed by changing micro distance between the upper surface of the movable grating and the reflecting surface of the underlying fixed reflector. The micro distance is a key factor to GMLM performance and it is difficult and expensive to measure with a common approach. A novel method adopting wavelength scanning is put forward and analyzed. Multi-peak method is developed to improve measurement accuracy by k multiple. Experiments with U-4100 spectrophotometer are carried on, which indicates that such method is available and experiment results are approaching theory analysis. Comparing with the result measured by WYKO white light interferometer, the error of demodulated result is about 1M. More important, because of wavelength accounted to calculate micro distance, measurement accuracy is up to nanometer level.

关 键 词： 光栅 调制器 波长扫描 峰值波长

领　　域： [电子电信]