作　　者： ; ; ;

机构地区： 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处： 《传感技术学报》 2006年第05B期1963-1966,1969,共5页

摘　　要： 作为硅微机械技术的替代,低成本的聚合物微制作变得越来越重要。在本研究中,开发了一种微模塑工艺,用以制作以聚合物为基底的平面线圈,将提高其可靠性,降低制造成本.双面密集微沟槽(100μm×70μm)阵列是线圈基底的一大特点,其初始图形用MEMS技术刻制在硅片上;利用PDMS良好的柔性、弹性和复型分辨率的特性制作了过渡模版,通过图形转移技术成功解决了刚性脱模难的问题.探索出了中温注射、低温固化、高温后固化的最佳模塑成型方法.通过电铸,制得了厚度为0.7mm、直径20mm的平面微电机定子线圈. Microfabrications of polymer are becoming increasingly important and considered as a low-cost alternative to the silicon MEMS technologies. A micromolding process has been developed, it will adapt for fabricating of planar coils with polymer substrate, enhance the reliability of coils and reduce its cost in manufacture. There is a characteristic of the substrates whose surfaces have dense arrays of narrow grooves （100 μm × 70 μm）. The original pattern is etched on the Surface of silicon wafer by MEMS process. Since PDMS has excellent flexibility, elasticity and replication resolution, we have made transition templates and solved the problem which is difficult to demolding rigidly by transforming patterns technology. We have researched and known the optimal molding method, injecting at medium temperature, curing at room temperature and post curing at high temperature. After electroplating, the stator coils of planar micromotor withth 0.7 mm ickness and Ф20 mm diameter bas been fabricated.

关 键 词： 平面线圈 微模塑 微沟槽 模版 固化

领　　域： [电子电信] [电气工程]