机构地区: 华南理工大学理学院微电子研究所
出 处: 《电子产品可靠性与环境试验》 2006年第5期64-67,共4页
摘 要: 由于MEMS器件的应用日益频繁,其可靠性研究就显得十分重要。介绍了引起可靠性问题的原因。以微机械加速度计为例,指出了该加速度计的可靠性问题,以及对其可靠性测试研究的内容。 It is important to study the reliability of MEMS for its frequently application. The issues causing the reliability problem are introduced in this article. At last, MEMS accelerometer is taken as an example. The reliability issues of MEMS accelerometer are presented and the reliability test aspects are introduced.
领 域: [电子电信] [自动化与计算机技术] [自动化与计算机技术]