作　　者： ; ; ;

机构地区： 清华大学机械工程学院摩擦学国家重点实验室

出　　处： 《润滑与密封》 2006年第10期4-7,32,共5页

摘　　要： 利用自制的微摩擦和粘附力测试装置,研究了在微牛量级载荷下,载荷和相对湿度对Si(100)材料与Si3N4材料组成的摩擦副的最大静摩擦和滑动摩擦的影响。实验发现,最大静摩擦力和滑动摩擦力均随着载荷的增大而增大,而最大静摩擦因数和滑动摩擦因数则随载荷增大而降低。相对湿度对摩擦的影响则随不同载荷的范围而有所不同。载荷较小时,相对湿度对摩擦因数的影响较大;载荷较大时,则相反。利用单峰接触的模型,建立了相对湿度与摩擦力关系的公式。 Effects of the load and relative humidity on the maximum static friction and sliding friction of Si（100） wafer were studied under micro-loads using a self-buih apparatus for micro-friction tests. The test results show that effects of the load and relative humidity on micro-friction are significant. Both the maximum static friction force and sliding friction force increase with loads, and the friction coefficients of them decreased with loads. The maximum static friction force goes up with the relative humidity. Sliding friction force ascendes with the relative humidity under lower loads, and then it would descend under higher loads. Effects of the relative humidity are remarkable under lower loads. But under higher loads, it would be insignificant. Based on single asperity contact model, a formula was built which describes the relationship between the relative humidity and friction force.

关 键 词： 载荷 相对湿度 滑动摩擦 最大静摩擦 毛细力

领　　域： [机械工程]