作　　者： ; ; ;

机构地区： 西安建筑科技大学材料学院

出　　处： 《化工新型材料》 2006年第9期61-64,共4页

摘　　要： 以Zn(OAC)2.2H2O和AlCl3.6H2O为原料,采用溶胶-凝胶的方法在普通玻璃片基材上获得了掺铝的氧化锌透明导电薄膜。采用XRD、SEM、以及分光光度计等分析手段对薄膜进行研究,实验结果表明,当铝离子掺杂量为2%(wt)、预处理温度400℃、退火温度550℃下保温1h,可使所得薄膜的电阻率最低,为5×10-2Ω.cm,薄膜可见光透过率平均达80%以上。 By using Zn（OAC）2 · 2H2O and AlCl3 · 6H2O as raw materials, the alluminum-doped ZnO thin films were prepared on the soda-lime glass by sol-gel process. By the measurements of SEM, XRD, four-probe method and UV-Vis spectroscopy, the electrical and optical properties of Al^3＋-doped ZnO thin films were investigated. The experiental data showed that the favourable electrical conducting thin films have been achieved with resistivity of 5 × 10^-2Ω·cm and the transmittance of〉80 % in 400-800nm visible region derived by Al/Zn ratios of 2. 0%; reheat treatment at 400 ℃ for 10min;annealing in vacuum at 550℃ for 1h.

关 键 词： 掺杂 薄膜 溶胶凝胶 导电性能 光学性能

领　　域： [化学工程]