作　　者： ; ; ;

机构地区： 北京信息工程学院传感技术研究中心

出　　处： 《中国工程科学》 2006年第8期23-27,共5页

摘　　要： 报道了一种利用旋转体自身角速度作为驱动力,通过各向异性刻蚀硅片制作的硅微机械陀螺。介绍了该陀螺敏感结构(硅摆)的设计、制作与封装工艺,用仿真器测试了旋转体的角速率。模拟试验和性能测试表明,该陀螺结构原理正确,可用于敏感旋转体的偏航或俯仰角速度,以及旋转体自身的角速度。 This paper reported a silicon micromachined gyroscope that is driven by the rotating carrier＇s angular velocity. The silicon chip was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced. The angular velocity of the rotating carrier was measured by emulator. The simulation experiment and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

关 键 词： 硅 各向异性腐蚀 角速度 仿真器

领　　域： [自动化与计算机技术] [自动化与计算机技术]