机构地区: 中北大学电子与计算机科学技术学院电子测试技术国家重点实验室
出 处: 《半导体技术》 2006年第7期537-541,共5页
摘 要: 根据引信环境信息探测的要求,设计了一种新型MEMS高g值压阻式加速度传感器敏感元件。通过ANSYS仿真对该结构进行了量程分析、抗过载分析、灵敏度分析及横向灵敏度分析,提供了一种新的阻尼设计方法。结合过载保护设计,较好地实现了结构阻尼控制与过载保护的融合。最后设计了一套可行的加工工艺。 Under the request of the detection of the circumstances of the fuze, a new MEMS high g piezoresistive accelerometer sensing element was designed, the measuring range, antioverloading ability, sensitivity and transverse sensitivity of the structure were analyzed, a new method of damping design was supplied and combined with overloading protection design, which preferably completed the combination of damping control and over loading protection. Finally, a suit of feasibly processing method was supplied.
领 域: [自动化与计算机技术] [自动化与计算机技术]