机构地区: 中山大学物理科学与工程技术学院物理系
出 处: 《中山大学学报(自然科学版)》 1996年第4期120-123,共4页
摘 要: 采用CO2脉冲激光掺杂,在P型和N型硅中掺入锑和铝,形成浅突变PN结太阳能电池,通过卢瑟福背散射,给出了PN结结深和杂质浓度分布,研究了预热温度、激光辐照能量密度、激光脉冲个数对方块电阻和太阳能电池开路电压的影响。 P type and n type doping achieved by CO 2 pulsed laser irradiation in silicon are studied, P N junction for solar cell is formed in the near-surface region between thin film of dopants(Sb, Al)and silicon substrate. Concentration of impurity and depth of p n junction is determined by Backscattering Spectra. The experimential parameters, such as temperature of substrate, power density of laser and number of laser pulse, effect on thin resistance R and open voltoge of solar cell V oc are studied I V characteristics of solar cell is meusured.
领 域: [电气工程]