作　　者： ; ; ; ;

机构地区： 吉林大学电子科学与工程学院集成光电子学国家重点联合实验室

出　　处： 《光子学报》 2006年第5期646-649,共4页

摘　　要： 研究了Mach-Zehnder型极化聚合物电光波导强度调制器的制备工艺·器件采用DANS(4-dimethylamino-4′nitro-stlibene)聚合物为电光波导材料,由电光波导层、上下介质缓冲层、上下金属电极层构成五层波导结构·对五层光波导各层之间的光学、化学以及微加工工艺的相互兼容性进行了深入研究·采用紫外光漂白方法制备出侧壁光滑的条波导,采用钨丝电晕极化方法对DANS聚合物波导进行有效极化,使其具有电光特性·通过优化器件制备工艺,研制出工作波长为1300nm的M-Z型电光波导强度调制器原型器件·实验测得器件半波电压约为10V,调制带宽约为1GHz· The fabrication process of Mach-Zehnder modulators of poled polymer electro-optic waveguides has been developed. A DANS （4-dimethylamino-4＇nitro-stlibene） polymer was selected as the electro-optic waveguide material. It was formed of five layers that consist of an electro-optic waveguide layer, two buffer layers and two metal electrode layers. The compatible properties of optics, chemistry and micro machining process among the layers were studied deeply. The channel waveguide with glazed sidewall was fabricated by using the ultraviolet photobleaching process. Then, by using the corona-poling setup with a tungsten wire electrode, the films were poled so that the waveguide had electro-optic property. Finally, by optimizing the fabrication process, the model device of M-Z type electro-optic intensity modulators working at 1300 nm wavelength has been developed. The half-wave voltage and modulation bandwidth of the device are about 10 V and 1 GHz, respectively.

关 键 词： 聚合物 电晕极化 紫外光漂白 电光波导 强度调制器

领　　域： [电子电信] [电子电信]