作　　者： ; ; ; ; ; ; ; ; ; ;

机构地区： 北京大学物理学院人工微结构与介观物理国家重点实验室

出　　处： 《低温物理学报》 2006年第1期31-35,共5页

摘　　要： 我们用混和物理化学气相沉积法(HPCVD)在不锈钢衬底上原位制备了以MgB2厚膜(约10微米厚)为过渡层的MgB2超导厚膜(约20微米厚)样品,两层膜总厚约30微米.X光衍射实验表明过渡层为(101)取向的织构膜,表层MgB2超导厚膜接近多晶膜,但有较强(101)取向,两者均含有少量的Mg和MgO杂相.此超导厚膜样品的Tc(onset)=37.8K,Tc(zero)=36.6K,ΔT=1.2K.对此样品的弯曲实验表明,以曲率半径500微米弯曲到180°后,样品仍具有Tc(onset)=37.8K,Tc(zero)=36.4K的超导电性.样品剖面SEM观测表明该膜结构致密,表面厚膜层和过渡层之间连接紧密.样品表面的SEM观测表明虽然样品弯曲导致表面MgB2超导厚膜面出现了裂缝,甚至有小部分膜面的脱落,但过渡层始终紧紧附着在不锈钢衬底上.这表明过渡层MgB2厚膜的存在大大地提高样品整体的柔韧性,展现了不锈钢衬底上的MgB2厚膜超导带(线)巨大的开发潜力和诱人的广阔应用前景. The MgB2 thick films, To（onset） =37.8K, Tc（zero） =36.6K were prepared on the stainless steel substrate by HPCVD method. First, we deposited the buffer layer of MgB2 with 10μm thick, then deposited the surface MgB2thick film layer with 20μm. The thickness of them together was about 30μm. The X-ray diffraction pattern showed that the buffer layer was textured along （101） direction, and the surface layer looked like polycrystalline, but still with strong （ 101 ） peak. Both of them contained a small amount of Mg and MgO impurities. The bending experiments indicated that the stainless steel substrate MgB2 thick film samples can keep their superconducting properties no change until the samples were bent to 180 with a 5001μm curvature radius. The cross section SEM presented that the thick film was dense without interface. The surface SEM indicated that the film adhered to the substrate very well, although a small part of the surface was dropped after it was bent to 180. These results indicated that the stainless steel substrate MgB2thick film possessed good ductility and had strong prospect on potential application.

关 键 词： 混合物理化学气相沉积 超导厚膜 过渡层 不锈钢衬底 韧度

领　　域： [化学工程] [化学工程] [一般工业技术]