作　　者： ; ; ; ;

机构地区： 河南大学化学化工学院

出　　处： 《河南大学学报（自然科学版）》 2005年第4期32-34,共3页

摘　　要： 利用直流-射频等离子化学气相沉积技术在玻璃、硅和钢表面沉积得到了薄膜,并用拉曼光谱和原子力对薄膜的结构和形貌进行了表征,用静动摩擦实验机对薄膜的摩擦学性能进行了测试.结果表明:沉积在硅和钢表面的薄膜具有典型类金刚石薄膜的特征,而沉积在玻璃表面的薄膜呈现类聚合物结构的特征,且沉积在玻璃表面的薄膜具有比较粗糙的表面,而沉积在硅表面的薄膜则比较光滑致密.摩擦学实验表明,沉积在硅表面的薄膜具有良好的摩擦学性能. Diamond-like carbon films were simultaneously prepared on the different substrates （glass, silicon; steel） by direct current radio frequency plasma enhanced chemical vapor deposition （ DC-RFPECVD）. The structure and morphology of the films was investigated by Raman spectroscopy and atomic force microscopy. The tribological behavior of the DLC films sliding against a Si3 N4 ball was investigated on a DF-PM unidirectional friction coefficient measurement apparatus. The result showed that the films deposited on silicon substrate and steel substrate had typical diamond-like characteristics and the film on silicon had smooth surface , but the film on the glass substrate had an polymer-like structure with rough surface. Moreover the film on the silicon substrate had good friction-reducing and antiwear behavior.

关 键 词： 衬底 类金刚石薄膜 结构 摩擦学性能

领　　域： [一般工业技术]