作　　者： ; ; ; ; ; ;

机构地区： 清华大学信息科学技术学院集成光电子学国家重点实验室

出　　处： 《光电子．激光》 2005年第10期1178-1181,共4页

摘　　要： 研究了分布反馈型半导体激光器(DFB-LD)与电吸收(EA)调制器集成光源中调制器端面残余反射对器件高频特性的影响及其消除。针对在DFB-LD/EA集成光源小信号调制响应曲线低频段观察到的异常起伏,测量了DFB-LD的强度噪声谱,比较了不同反向偏压下EA调制器的调制响应。实验结果表明,对集成器件调制响应的干扰主要是来自于EA调制器端面的残余反射而不是微波调制信号的串扰。为了抑制调制器端面的光反射,优化了抗反镀膜工艺,基本消除了调制响应的异常起伏,有效改善了集成器件的高频调制特性。 The influence of residual facet reflection on the high-frequency response of distributed feedback semiconductor laser （DFB-LD）/electroabsorption （EA） modulator integrated light sources and its suppression are studied. To explain the peaks observed in the low frequency range of the modulation response of the integrated light sources, we measured the relative intensity noise spectra of the DFB LD and the modulation response of the EA modulator at different reverse biases. It is found that the key factor influencing the modulation response of integrated light sources comes from the residual reflection at the EA facet rather than the microwave signal crosstalk. In order to suppress the facet reflection, improved anti-reflection coating was applied to EA modulator facet,and efficient improvement in high-frequency performance has been demonstrated.

关 键 词： 集成光源 分布反馈型半导体激光器 电吸收 调制器 强度噪声谱 端面镀膜

领　　域： [电子电信]