机构地区: 清华大学
出 处: 《中国机械工程》 2005年第20期1787-1790,共4页
摘 要: 基于刚性运动方程和非线性最优化方法提出了一种超精密二维工作台自标定模型,研究了随机测量误差在自标定过程中的传递特性,在此基础上提出了超精密二维工作台自标定算法。给出了一个应用实例,验证了该算法的可行性和有效性。 Based on the rigid motion equations and the non-linear optimization method, this paper provided a model for self-calibration of two-dimensional ultra-precision stages and the error propagation in self-calibration of the stages. According to this, the self-calibration algorithm for two-dimensional ultra-precision stages is given, and an example is presented for verification of the given self-calibration algorithm.
领 域: [机械工程]