作　　者： ; ; ; ; ; ;

机构地区： 东北大学机械工程与自动化学院

出　　处： 《材料保护》 2005年第7期5-7,共3页

摘　　要： 为了对比研究不同透明衬底上ZnO:Al(ZAO)薄膜的性能,采用直流反应溅射法制备薄膜,并对其作EDS、XRD和电学测试分析。结果表明:所制备的ZAO薄膜具有典型的ZnO晶体结构;沉积在玻璃基片上的ZAO薄膜,Al,O含量高于沉积在透明聚酯塑料基片上的,而Zn的含量则相反;在两种衬底上获得的ZAO薄膜电阻率分别为4.5×10-4Ω·cm和9.73×10-4Ω·cm,可见光透射率分别达到87.7%和81.5%。由此可见:用直流反应磁控溅射法在不同衬底上都能获得可见光透射率达到80%以上的ZAO薄膜;相比而言,在玻璃衬底上获得的ZAO薄膜电阻率低,而在透明聚酯塑料上沉积的ZAO薄膜透射性好。 The transparent conducting ZAO films were prepared on transparent glass and organic plastic substrates using direct current (DC) magnetron reaction sputtering. The resulting ZAO films were characterized by means of energy dispersive spectroscopy and X-ray diffraction. The electronic and optical properties of the films were analyzed as well. As the results, it was feasible to prepare high-quality ZAO films on glass and organic plastic substrates using DC magnetron reaction sputtering. The ZAO films had the same typical crystal structure as ZnO. The ZAO film deposited on the glass substrate had a higher content of Zn and Al than that deposited on the organic plastic, while the former had a smaller Zn content than the latter. Moreover, the ZAO film deposited on the glass substrate had a lower resistivity, while that deposited on the organic plastic had better light-transmission capacity. Namely, the ZAO films deposited on the glass and organic plastic had a resistivity of 4.5×10 -4 Ω·cm and 9.73×10 -4Ω·cm, respectively; while they had transmissivity of 87.7% and 81.5% in visible region.

关 键 词： 薄膜 衬底 直流磁控溅射 性能 衍射分析 电阻率 透射率

领　　域： [理学] [理学]