作　　者： ; ; ; ;

机构地区： 清华大学机械工程学院摩擦学国家重点实验室

出　　处： 《摩擦学学报》 2005年第3期283-288,共6页

摘　　要： 评述了国内外航天、信息和军事等高技术领域中微/纳米制造技术的研究现状和发展趋势,介绍了微/纳米制造技术特征及其关键技术问题,揭示了当器件的尺度由毫米量级减小到微米甚至纳米量级时,微器件材料表面和界面的摩擦学(摩擦磨损及润滑)、力学和化学等及其控制方法是微/纳米制造研究中急需解决的关键技术问题.这些问题的解决对摩擦学研究提出了严峻挑战,新的摩擦学理论和技术的出现将为微/纳米制造技术的发展以及相关问题的解决提供保障. A review was given on the development of micro- and nano-manufacturing technology and its challenges to tribology. It was pointed out that with the ceaseless development of high technologies of spaceflight, information, instruments, and military equipment towards micromation and high-precision, micro- and nano-manufacturing technology has been increasingly focused on. With the size of device decreasing from millimeter scale to micrometer scale or even nanometer scale, surface forces become a dominant role. In this case the conventional rules and control methods for the surface and interface behaviors of micro-sized devices could be invalid. It is imperative to find new theories and methodologies to deal with the surface and tribological problems concerning the micro- and nano-scale devices, including friction, wear, lubrication behavior, and mechanical and chemical properties. Moreover, it was suggested that many of the vital technologies in the micro- and nano-manufacturing would be related to nanoscale wear, nanogap lubrication, manufacture and modification of low-energy surfaces, friction and adhesion between the interfaces, active control of friction, and ultra-lubrication. It was anticipated that solving those problems would contribute greatly to speed up the development of micro- and nano-manufacturing technology.

关 键 词： 微 纳米制造技术 表面与界面 摩擦学 挑战

领　　域： [机械工程]