作　　者： ; ; ; ;

机构地区： 华中科技大学机械科学与工程学院微系统研究中心

出　　处： 《光电子．激光》 2005年第5期570-574,共5页

摘　　要： 采用集成频闪成像、计算机微视觉和显微干涉技术,研制了微机电系统(MEMS)三维静动态测试系统。系统可进行MEMS面内刚体运动、表面形貌、垂向变形和离面运动的测量。对于面内运动测量,提出了基于立方样条插值的亚像素步长相关模板匹配算法,从MEMS视觉图中提取面内位移,匹配精度为0.02 pixels。对于离面运动测量,采用Hariharan 5步相移干涉(PSI)算法和去包裹算法,离面运动测量分辨率可达1 nm。通过对Si微压力传感器膜和Si微陀螺仪的静动态测试,验证了系统的适用性和可靠性。 A measurement system for 3D static and dynamic characterization of microelectromechanical systems (MEMS), in which stroboscopic imaging, computer microvision and microscopic interferometry were applied, was developed for measuring in-plane-rigid-body motions, surface shapes, out-of-plane motions and deformations of microstructures. A new algorithm of sub-pixel step length correlation template matching based on cubic spline interpolation was proposed to extract the in-plane displacement from vision images with a resolution 0.02 pixel. Hariharan five-step phase-shift interferometry (PSI) algorithm and unwrapping algorithms were adopted to measure out-of-plane motions. The out-of-plane displacement resolution is better than 1 nm. The practicability and reliability of system are illustrated with the study of the static characterizations of a pressure sensor and the dynamic behavior of a microgyroscope.

关 键 词： 动态测试系统 微机电系统 三维 模板匹配算法 微压力传感器 运动测量 去包裹算法 测量分辨率 干涉技术 刚体运动 表面形貌 样条插值 面内位移 匹配精度 相移干涉 微陀螺仪 计算机 长相关 亚像素 可靠性 适用性 视觉

领　　域： [自动化与计算机技术] [自动化与计算机技术] [轻工技术与工程] [轻工技术与工程]