机构地区: 浙江大学材料科学与工程学系硅材料国家重点实验室
出 处: 《传感技术学报》 2005年第1期47-49,52,共4页
摘 要: 采用无机试剂 (SnCl2 ·2H2 O)为原料 ,用溶胶 凝胶提拉法制备了二氧化锡薄膜及相应的气敏传感器 ,并研究了二氧化锡薄膜气敏传感器在常见室内污染气体气氛中的电阻 - 温度变化关系。结果发现不同气氛下电阻 温度特性各不相同 ,由此可以获得被测气体的相关信息。本文还用分子轨道计算软件对四种室内污染气体的分子轨道进行了计算 ,并根据分子轨道能级的相对位置定性解释了二氧化锡薄膜气敏传感器在不同气氛中的电阻 温度曲线。通过对甲醛、苯、甲苯、二甲苯四种气体电阻 温度曲线的测试可以确定被测气体的种类。 SnO\-2 thin-film gas-sensor was fabricated by sol-gel dip-coating process using SnCl_2·2H_2O as starting materials. Temperature dependence characterristics of the resistance was investigated in four hazardous indoor gases (formaldehyde, benzene, dimethyl benzene, methyl benzene). It was found that resistance-temperature characteristics were different for different gases. Molecular orbital calculation results based on MOPAC indicate that resistance-temperature characteristics of SnO_2 thin-film are related to the molecular orbital levels. Therefore measurement of resistance-temperature curves could enhance the selectivity of the SnO_2 thin-film gas sensors.