机构地区: 清华大学
出 处: 《机械设计与制造》 2005年第1期71-73,共3页
摘 要: 对无磨料低温抛光这种全新的工艺方法进行了系统的研究,包括抛光设备、抛光冰盘的制备、工件盘的制备、抛光盘的修整、抛光后工件的清洗、抛光后表面粗糙度的测量等。并用此种方法对石英晶体进行了抛光实验,得到了Ra0.53mm的超光滑表面,结果证明这是一种获得超光滑表面的新方法。 Non-abraslve cryogenic polishing is a new super-precision machining method The process of non-abrasive cryogenic polishing is comprehen sively researched in this paper.Polishing tools the manufacturing methods of ice disk and work disk,the modifying of ice disk.method of rinsing and measurement of polished surface are considered.Quartz giass is polished by this process and surface roughness Ra0.53mm is realized.Result shows that non-abrasive cryogeni c polishing is a new process to gain super-smooth surface for optical material .
领 域: [机械工程]