作　　者： ; ;

机构地区： 中国科学院广州能源研究所

出　　处： 《分析测试学报》 2004年第6期114-118,123,共6页

摘　　要： 微电子机械系统 (microeletromechanicalsystem,MEMS)技术的兴起及其在生物化学领域的广泛应用 ,推动了聚合酶链式反应 (polymerasechainreaction,PCR)热循环装置越来越微型化 ,各种PCR微芯片/装置被开发。本文主要介绍了基于MEMS技术的连续流动式PCR(continuous_flowPCR)芯片/微装置的相关技术 ,包括基底材料的选择、通道表面钝化技术、微细加工技术、封接技术以及系统检测技术等 。 Use of the polymerase chain reaction technology as a tool of DNA amplification has been acceleratˉed with the growing popularity of microelectromechanical system(MEMS)technology as well as its broad appliˉcations in the field of biochemistry.Thermocycling devices of PCR have been increasingly miniaturized and various PCR microchips/devices have been developed.The related technologies of continuous-flowPCR miˉcrochips or devices based on MEMS are described in this review,including the choice of substrate materials,surface passivation,micromachining/packaging and detection technology.Finally,the current status of reˉsearch work is briefly reviewed.

关 键 词： 连续流动式 芯片技术 微电子机械系统技术 基底材料选择 表面钝化 微细加工 封接技术

领　　域： [理学] [理学]