作　　者： ; ; ; ; ;

机构地区： 河南大学

出　　处： 《功能材料》 2004年第5期560-562,共3页

摘　　要： 　利用液相电沉积的方法,从乙腈中在硅片上沉积非晶碳薄膜,首次发现了电流密度随反应时间呈波动变化的规律。红外光谱和拉曼光谱分析表明所得薄膜是一种典型的含氢类金刚石薄膜(a C∶H薄膜),并用高斯分解的方法对非晶碳薄膜的拉曼光谱和X射线光电子能谱进行定量分析,从而确定这种a C∶H薄膜中sp3的相对含量为30%～35%。 Diamond-like carbon films were deposited on Si plate from acetonitrile by using the liquid phase electrodeposition technique. The fact that current density fluctuates like the wave has been reported for the first time. The films were characterized by fourier transform infrared spectroscopy, Raman spectroscopy and X-ray photoelectron spectroscopy sequentially. The results showed that the films were typical hydrogenated DLC films. The Gauss decomposition technique was applied to Raman spectroscopy and X-ray photoelectron spectroscopy, and the fact that the percentage of sp^3 was 30%～35% was confirmed.

关 键 词： 液相电沉积 薄膜 光谱 高斯分解

领　　域： [金属学及工艺] [金属学及工艺]