作　　者： ; ; ; ; (范朝龙）; (郑俊威）;

机构地区： 广东工业大学

出　　处： 《应用光学》 2015年第2期287-293,共7页

摘　　要： 通过对光栅尺原理的研究,设计一种宏微复合切换测量模式,利用增量码进行低精度测量,绝对码进行高精度测量。采用增量方式采集莫尔条纹的高速性,解决高精度绝对位置采集的低速性,实现宏微复合的高速与高精度的测量。实验证明,高精度低速绝对位置测量过程中测量精度可达0.6μm,在测量中使用新型高速与低速的变速切换测量方式,综合测量速度最高可以达到2m/s。 Through studying the theory of absolute optical encoder ,we designed a macro/micro switch measurement .We used the incremental code for low precision measurement ,and the absolute code for high‐precision measurement .The incremental acquisition method was used to acquire Moiré fringe at a high rate of speed ,which could solve the problem of low velocity w hen using precise absolute optical encoder ,and implemented high‐speed and high‐precision measurement that was a combination of macro and micro .Experiment proves that the precision of high‐precision low‐speed measurement of absolute position can be up to 0 .6 μm ,the used new‐type model of high/low velocity switch measurement can make the comprehensive meas‐urement speed up to 2 m/s .

关 键 词： 绝对光栅尺 宏微复合 速度切换 精密

领　　域： [电子电信]