作　　者： ; ; ; (杨杰伟）;

机构地区： 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处： 《微细加工技术》 2006年第4期34-38,共5页

摘　　要： 介绍了一种微模塑工艺,可用于制作以聚合物为基底的微电机定子,从而提高了电机的可靠性,降低了制造成本。双面密集微沟槽(100μm×70μm)阵列是定子基底的一大特点,其初始图形用MEMS技术刻制在硅片上,再利用PDMS良好的柔性、弹性和复型分辨率特性制作过渡模版,通过图形转移技术成功地解决了刚性脱模难的问题。通过在室温下固化12 h和在80℃中后固化0.5 h,可模塑出完好的薄片状环氧树脂基底,制得了厚度为0.6 mm、线圈组外径为20 mm的聚合物基定子。 A micromolding technique was studied, which was used for fabricating stators of micromotors with polymer substrate, and the technique increase the reliability of micromotors and reduce cost of manufacturing. An important feature of this substrate is that both the surfaces of the substrates have dense arrays of narrow grooves. The original pattern is etched on the surface of silicon wafer by MEMS process. According to the characteristics of PDMS such as excellent flexibility, elasticity and replication resolution, the transition templates were made, and the difficulty of demolding rigidly was solved by transforming patterns technology. After epoxy was cured 12 hours at room temperature and then 0.5 hours at 80°C, a perfect thin epoxy substrates was made, which its thickness is and the outer diameter of the array of the coils is.

关 键 词： 平面线圈 微模塑 微沟槽 模版 固化

领　　域： [电气工程]